@article{TUW-101111, author = {Noll, H. and Selberherr, Siegfried}, title = {{Z}ur {E}ntwicklung der {M}ikroelektronik}, journal = {{T}elematik}, year = {1998}, volume = {4}, number = {1}, pages = {2--6}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/JB1998_Noll_1.pdf} }