@incollection{TUW-101118, author = {Langer, Erasmus and Selberherr, Siegfried}, title = {{P}roze{\ss}simulation: {S}tand der {T}echnik}, booktitle = {{F}estk{\"o}rperprobleme 36}, year = {1996}, editor = {Helbig, R.}, pages = {203--243}, publisher = {{V}ieweg}, url = {http://publik.tuwien.ac.at/files/PubDat_101118.pdf}, isbn = {3-528-08043-4}, note = {invited} }