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@phdthesis{TUW-101138,
    author = {Radi, Mustafa},
    title = {{T}hree-{D}imensional {S}imulation of {T}hermal {O}xidation},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1998},
    url = {http://www.iue.tuwien.ac.at/phd/radi}
}