@phdthesis{TUW-101138, author = {Radi, Mustafa}, title = {{T}hree-{D}imensional {S}imulation of {T}hermal {O}xidation}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1998}, url = {http://www.iue.tuwien.ac.at/phd/radi} }