@inproceedings{TUW-101147, author = {H{\"o}ssinger, Andreas and Selberherr, Siegfried and Kimura, M. and Nomachi, I. and Kusanagi, S.}, title = {{T}hree-{D}imensional {M}onte-{C}arlo {I}on {I}mplantation {S}imulation for {M}olecular {I}ons}, booktitle = {{P}roceedings {S}ymp. on {P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology}, year = {1999}, pages = {18--25}, publisher = {{E}lectrochemical {S}ociety}, address = {99-2}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/CP1999_Hoessinger_1.pdf}, isbn = {1-56677-224-9}, note = {talk: {S}ymposium on {P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology, {S}eattle; 1999-05-05 -- 1999-05-06} }