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@inproceedings{TUW-101147,
    author = {H{\"o}ssinger, Andreas and Selberherr, Siegfried and Kimura, M. and Nomachi, I. and Kusanagi, S.},
    title = {{T}hree-{D}imensional {M}onte-{C}arlo {I}on {I}mplantation {S}imulation for {M}olecular {I}ons},
    booktitle = {{P}roceedings {S}ymp. on {P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology},
    year = {1999},
    pages = {18--25},
    publisher = {{E}lectrochemical {S}ociety},
    address = {99-2},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/CP1999_Hoessinger_1.pdf},
    isbn = {1-56677-224-9},
    note = {talk: {S}ymposium on {P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology, {S}eattle; 1999-05-05 -- 1999-05-06}
}