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@inproceedings{TUW-101150,
    author = {H{\"o}ssinger, Andreas and Selberherr, Siegfried},
    title = {{A}ccurate {T}hree-{D}imensional {S}imulation of {D}amage {C}aused by {I}on {I}mplantation},
    booktitle = {{P}roceedings {I}ntl. {C}onf. on {M}odeling and {S}imulation of {M}icrosystems},
    year = {1999},
    pages = {363--366},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/CP1999_Hoessinger_2.pdf},
    isbn = {0-9666135-4-6},
    note = {talk: {I}nternational {C}onference on {M}odeling and {S}imulation of {M}icrosystems ({M}{S}{M}), {S}an {J}uan; 1999-04-19 -- 1999-04-21}
}