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@inproceedings{TUW-101156,
    author = {Pyka, Wolfgang and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {T}i{N} {M}agnetron {S}putter {D}eposition},
    booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})},
    year = {1998},
    pages = {324--327},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Pyka_2.pdf},
    isbn = {2-86332-234-6},
    note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {B}ordeaux; 1998-09-07 -- 1998-09-09}
}