@inproceedings{TUW-101156, author = {Pyka, Wolfgang and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {T}i{N} {M}agnetron {S}putter {D}eposition}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {1998}, pages = {324--327}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Pyka_2.pdf}, isbn = {2-86332-234-6}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {B}ordeaux; 1998-09-07 -- 1998-09-09} }