@article{TUW-101164, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}hotolithography {S}imulation}, journal = {{I}{E}{E}{E} {J}ournal of {T}echnology {C}omputer {A}ided {D}esign}, year = {1997}, volume = {1}, number = {6}, pages = {1--37}, url = {http://www.iue.tuwien.ac.at/htmlpapers/kirchauer-jun97/}, doi = {10.1109/TCAD.1996.6449163} }