@article{TUW-101171, author = {Bohmayr, Walter and Burenkov, A. and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried}, title = {{M}onte {C}arlo {S}imulation of {S}ilicon {A}morphization during {I}on {I}mplantation}, journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems}, year = {1998}, volume = {17}, number = {12}, pages = {1236--1243}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1998_Bohmayr_1.pdf}, doi = {10.1109/43.736563} }