@article{TUW-101174, author = {Selberherr, Siegfried}, title = {{D}ie gro{\ss}en {H}erausforderungen in der {M}ikroelektronik in den n{\"a}chsten zehn {J}ahren}, journal = {{E}{\&}{I} {E}lektrotechnik und {I}nformationstechnik}, year = {1998}, volume = {115}, number = {7/8}, pages = {344--348}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/JB1998_Selberherr_1.pdf}, doi = {10.1007/BF03159602}, note = {invited} }