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@phdthesis{TUW-101179,
    author = {Bohmayr, Walter},
    title = {{S}imulation der {I}onenimplantation in kristalline {S}iliziumstrukturen},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1996},
    url = {http://www.iue.tuwien.ac.at/phd/bohmayr}
}