@phdthesis{TUW-101184, author = {Leitner, Ernst}, title = {{D}iffusionsprozesse in dreidimensionalen {S}trukturen}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1997}, url = {http://www.iue.tuwien.ac.at/phd/leitner} }