@phdthesis{TUW-101185, author = {Pichler, Christoph}, title = {{I}ntegrated {S}emiconductor {T}echnology {A}nalysis}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1997}, url = {http://www.iue.tuwien.ac.at/phd/pichler}, doi = {10.34726/hss.1997.02035427} }