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@phdthesis{TUW-101185,
    author = {Pichler, Christoph},
    title = {{I}ntegrated {S}emiconductor {T}echnology {A}nalysis},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1997},
    url = {http://www.iue.tuwien.ac.at/phd/pichler},
    doi = {10.34726/hss.1997.02035427}
}