[Back]

@phdthesis{TUW-101186,
    author = {Puchner, Helmut},
    title = {{A}dvanced {P}rocess {M}odeling for {V}{L}{S}{I} {T}echnology},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1996},
    url = {http://www.iue.tuwien.ac.at/phd/puchner}
}