@mastersthesis{TUW-101204, author = {Zankl, Gernot}, title = {{\"{U}}ber die {E}rzeugung von {G}itterst{\"u}tzpunkten in {D}reidimensionalen {G}eometrien}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1997} }