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@mastersthesis{TUW-101205,
    author = {Wittine, Christoph},
    title = {{G}eneration of {T}wo-{D}imensional {D}evice {S}tructures from {O}ne-{D}imensional {T}opography, {P}rofile and {L}ayout {D}ata},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1998}
}