@inproceedings{TUW-101231, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}hotolithography {S}imulation}, booktitle = {{P}roceedings {S}eminar {B}asics and {T}echnology of {E}lectronic {D}evices}, year = {1997}, pages = {27--31}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1997_Kirchauer_1.pdf}, isbn = {3-901578-02-1}, note = {talk: {G}rundlagen und {T}echnologie elektronischer {B}auelemente, {G}ro{\ss}arl; 1997-03-19 -- 1997-03-22} }