[Back]

@inproceedings{TUW-101231,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {P}hotolithography {S}imulation},
    booktitle = {{P}roceedings {S}eminar {B}asics and {T}echnology of {E}lectronic {D}evices},
    year = {1997},
    pages = {27--31},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1997_Kirchauer_1.pdf},
    isbn = {3-901578-02-1},
    note = {talk: {G}rundlagen und {T}echnologie elektronischer {B}auelemente, {G}ro{\ss}arl; 1997-03-19 -- 1997-03-22}
}