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@inproceedings{TUW-101235,
    author = {Langer, Erasmus and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {P}rocess {S}imulation for {A}dvanced {S}ilicon {S}emiconductor {D}evices},
    booktitle = {{P}roceedings {A}{S}{D}{A}{M} 96 {C}onf.},
    year = {1996},
    pages = {169--177},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1996_Langer_1.pdf},
    note = {invited; talk: {I}nternational {C}onference on {A}dvanced {S}emiconductor {D}evices and {M}icrosystems ({A}{S}{D}{A}{M}), {S}molenice; 1996-10-20 -- 1996-10-24}
}