@inproceedings{TUW-101235, author = {Langer, Erasmus and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}rocess {S}imulation for {A}dvanced {S}ilicon {S}emiconductor {D}evices}, booktitle = {{P}roceedings {A}{S}{D}{A}{M} 96 {C}onf.}, year = {1996}, pages = {169--177}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1996_Langer_1.pdf}, note = {invited; talk: {I}nternational {C}onference on {A}dvanced {S}emiconductor {D}evices and {M}icrosystems ({A}{S}{D}{A}{M}), {S}molenice; 1996-10-20 -- 1996-10-24} }