@inproceedings{TUW-101242, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{R}igorous {T}hree-{D}imensional {P}hotolithography {S}imulation {O}ver {N}onplanar {S}tructures}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {1996}, pages = {347--350}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1996_Kirchauer_2.pdf}, isbn = {2-86332-196-x}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {B}ologna; 1996-09-09 -- 1996-09-11} }