@inproceedings{TUW-101243, author = {Puchner, Helmut and Neary, P. and Aronowitz, Sheldon and Selberherr, Siegfried}, title = {{A} {T}ransient {A}ctivation {M}odel for {P}hosphorus after {S}ub-{A}morphizing {C}hanneling {I}mplants}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {1996}, pages = {157--160}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1996_Puchner_1.pdf}, isbn = {2-86332-196-x}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {B}ologna; 1996-09-09 -- 1996-09-11} }