@inproceedings{TUW-101245, author = {Fleischmann, Peter and Sabelka, Rainer and Stach, Andreas and Strasser, Rudolf and Selberherr, Siegfried}, title = {{G}rid {G}eneration for {T}hree-{D}imensional {P}rocess and {D}evice {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1996}, pages = {161--166}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1996_Fleischmann_2.pdf}, isbn = {0-7803-2745-4}, doi = {10.1109/SISPAD.1996.865321}, note = {invited; talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 1996-09-02 -- 1996-09-04} }