[Back]

@inproceedings{TUW-101246,
    author = {Pichler, Christoph and Plasun, Richard and Strasser, Rudolf and Selberherr, Siegfried},
    title = {{S}imulation {E}nvironment for {S}emiconductor {T}echnology {A}nalysis},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {1996},
    pages = {147--148},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1996_Pichler_1.pdf},
    isbn = {0-7803-2745-4},
    doi = {10.1109/SISPAD.1996.865314},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 1996-09-02 -- 1996-09-04}
}