@inproceedings{TUW-101249, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}hotoresist {E}xposure and {D}evelopment {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1996}, pages = {99--100}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1996_Kirchauer_1.pdf}, isbn = {0-7803-2745-4}, doi = {10.1109/SISPAD.1996.865291}, note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 1996-09-02 -- 1996-09-04} }