@inproceedings{TUW-101250, author = {Bohmayr, Walter and Burenkov, A. and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried}, title = {{M}onte {C}arlo {S}imulation of {S}ilicon {A}morphization {D}uring {I}on {I}mplantation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1996}, pages = {17--18}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1997/CP1996_Bohmayr_1.pdf}, isbn = {0-7803-2745-4}, doi = {10.1109/SISPAD.1996.865252}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {T}okyo, {J}apan; 1996-09-02 -- 1996-09-04} }