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@article{TUW-101261,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {P}hotolithography {S}imulator {I}ncluding {R}igorous {N}onplanar {E}xposure {S}imulation for {O}ff-{A}xis {I}llumination},
    journal = {{P}roceedings of {S}{P}{I}{E}},
    year = {1998},
    volume = {3334},
    pages = {764--776},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Kirchauer_1.pdf},
    doi = {10.1117/12.310809}
}