@article{TUW-101261, author = {Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {P}hotolithography {S}imulator {I}ncluding {R}igorous {N}onplanar {E}xposure {S}imulation for {O}ff-{A}xis {I}llumination}, journal = {{P}roceedings of {S}{P}{I}{E}}, year = {1998}, volume = {3334}, pages = {764--776}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Kirchauer_1.pdf}, doi = {10.1117/12.310809} }