@inproceedings{TUW-101276, author = {Kosina, Hans and Selberherr, Siegfried}, title = {{T}echnology {C}{A}{D}: {P}rocess and {D}evice {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})}, year = {1997}, pages = {441--450}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1997_Kosina_2.pdf}, isbn = {0-7803-3664-x}, doi = {10.1109/ICMEL.1997.632866}, note = {invited; talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 1997-09-14 -- 1997-09-17} }