@inproceedings{TUW-101294, author = {Pyka, Wolfgang and Martins, Rui and Selberherr, Siegfried}, title = {{E}fficient {A}lgorithms for {T}hree-{D}imensional {E}tching and {D}eposition {S}imulation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1998}, pages = {16--19}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/CP1998_Pyka_1.pdf}, isbn = {3-211-83208-4}, doi = {10.1007/978-3-7091-6827-1{\_}5}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {L}euven, {B}elgium; 1998-09-02 -- 1998-09-04} }