@phdthesis{TUW-101313, author = {Pyka, Wolfgang}, title = {{F}eature {S}cale {M}odeling for {E}tching and {D}eposition {P}rocesses in {S}emiconductor {M}anufacturing}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2000}, url = {http://www.iue.tuwien.ac.at/phd/pyka} }