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@phdthesis{TUW-101313,
    author = {Pyka, Wolfgang},
    title = {{F}eature {S}cale {M}odeling for {E}tching and {D}eposition {P}rocesses in {S}emiconductor {M}anufacturing},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2000},
    url = {http://www.iue.tuwien.ac.at/phd/pyka}
}