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@inproceedings{TUW-101336,
    author = {Pyka, Wolfgang and Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {R}esist {D}evelopment {S}imulation - {B}enchmarks and {I}ntegration with {L}ithography},
    booktitle = {{A}bstracts {M}icro-and-{N}ano-{E}ngineering 99 {C}onf.},
    year = {1999},
    pages = {305--306},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1999/CP1999_Pyka_1.pdf},
    note = {talk: {M}icro- and {N}ano-{E}ngineering {C}onference, {R}om; 1999-09-21 -- 1999-09-23}
}