@inproceedings{TUW-101338, author = {Pyka, Wolfgang and Fleischmann, Peter and Haindl, Bernhard and Selberherr, Siegfried}, title = {{L}inking {T}hree-{D}imensional {T}opography {S}imulation with {H}igh {P}ressure {C}{V}{D} {R}eaction {K}inetics}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1999}, pages = {199--202}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Pyka_1.pdf}, isbn = {4-930813-98-0}, doi = {10.1109/SISPAD.1999.799295}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08} }