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@inproceedings{TUW-101339,
    author = {Pyka, Wolfgang and Sukharev, V. and Kumar, K. and Joh, S. and McInerney, J.E.},
    title = {{A} 3{D} {I}ntegrated {S}imulation of {A}cross-{W}afer {M}etal {S}tack {G}ap-{F}ill for {L}ocal {I}nterconnect {A}pplications},
    booktitle = {{P}roceedings of the 16th {I}ntl. {V}{L}{S}{I} {M}ultilevel {I}nterconnection {C}onf.},
    year = {1999},
    pages = {477--479},
    note = {poster presentation: {I}nternational {V}{L}{S}{I} {M}ultilevel {I}nterconnection {C}onference ({V}{M}{I}{C}), {S}anta {C}lara; 1999-09-07 -- 1999-09-09}
}