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@inproceedings{TUW-101342,
    author = {Haindl, Bernhard and Kosik, Robert and Fleischmann, Peter and Selberherr, Siegfried},
    title = {{C}omparison of {F}inite {E}lement and {F}inite {B}ox {D}iscretization for {T}hree-{D}imensional {D}iffusion {M}odeling {U}sing {A}{M}{I}{G}{O}{S}},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {1999},
    pages = {131--134},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Haindl_1.pdf},
    isbn = {4-930813-98-0},
    doi = {10.1109/SISPAD.1999.799278},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08}
}