@inproceedings{TUW-101343, author = {H{\"o}ssinger, Andreas and Radi, Mustafa and Scholz, B. and Fahringer, T. and Langer, Erasmus and Selberherr, Siegfried}, title = {{P}arallelization of a {M}onte-{C}arlo {I}on {I}mplantation {S}imulator for {T}hree-{D}imensional {C}rystalline {S}tructures}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1999}, pages = {103--106}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Hoessinger_5.pdf}, isbn = {4-930813-98-0}, doi = {10.1109/SISPAD.1999.799271}, note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08} }