@inproceedings{TUW-101346, author = {Burenkov, A. and Tietzel, K. and H{\"o}ssinger, Andreas and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried}, title = {{A} {C}omputationally {E}fficient {M}ethod for {T}hree-{D}imensional {S}imulation of {I}on {I}mplantation}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {1999}, pages = {55--58}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/CP1999_Burenkov_1.pdf}, isbn = {4-930813-98-0}, doi = {10.1109/SISPAD.1999.799258}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}yoto, {J}apan; 1999-09-06 -- 1999-09-08} }