@article{TUW-101410, author = {Pogany, Dionyz and Seliger, Norbert and Lalinsky, T. and Kuzmik, Jan and Habas, Predrag and Hrkut, P. and Gornik, Erich}, title = {{S}tudy of {T}hermal {E}ffects in {G}a{A}s {M}icromachined {P}ower {S}ensor {M}icrosystems by an {O}ptical {I}nterferometer {T}echnique}, journal = {{M}icroelectronics {J}ournal}, year = {1998}, volume = {29}, pages = {191--198}, url = {https://publik.tuwien.ac.at/files/publik_101410.pdf}, doi = {10.1016/S0026-2692(97)00057-8} }