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@article{TUW-101430,
    author = {von Criegern, R. and Jahnel, F. and Lange-Gieseler, R. and Pearson, P. and Hobler, Gerhard and Simionescu, A.},
    title = {{V}ertification of ''lateral second. ion mass spectrom.'' as method for measuring lateral dopant dose distr. in me test str.},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {1998},
    volume = {B 16(1)},
    pages = {386--393}
}