@article{TUW-101431, author = {Nikulin, A.Y. and Stevenson, A.W. and Hashizume, H. and Cookson, D. and Hobler, Gerhard and Wilkins, S.W.}, title = {{M}odel-{I}ndependent determination of 2{D} strain distribution in ion implanted silicon crystals from x-ray diffraction data}, journal = {{S}emiconductor {S}cience and {T}echnology}, year = {1997}, volume = {12(3)}, pages = {350--354} }