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@article{TUW-101432,
    author = {Hobler, Gerhard and Fehlmann, G.},
    title = {{A} study of ultra-shallow implanted dopant profiles in silicon using {B}{C} and {M}{D} simulations},
    journal = {{R}adiation {E}ffects and {D}effects in {S}olids},
    year = {1997},
    volume = {141},
    pages = {113--125}
}