@article{TUW-101432, author = {Hobler, Gerhard and Fehlmann, G.}, title = {{A} study of ultra-shallow implanted dopant profiles in silicon using {B}{C} and {M}{D} simulations}, journal = {{R}adiation {E}ffects and {D}effects in {S}olids}, year = {1997}, volume = {141}, pages = {113--125} }