@article{TUW-101437, author = {Hobler, Gerhard and Simionescu, A. and Palmetshofer, L. and Jahnel, F. and von Criegern, R. and Tian, C. and Stingeder, G.}, title = {{V}ertification of models for the simulation of boron implantation into crystalline silicon}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}}, year = {1996}, volume = {B 14(1)}, pages = {272--277} }