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@article{TUW-101437,
    author = {Hobler, Gerhard and Simionescu, A. and Palmetshofer, L. and Jahnel, F. and von Criegern, R. and Tian, C. and Stingeder, G.},
    title = {{V}ertification of models for the simulation of boron implantation into crystalline silicon},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {1996},
    volume = {B 14(1)},
    pages = {272--277}
}