@article{TUW-101443, author = {Simionescu, A. and Herzog, S. and Hobler, Gerhard and Schork, R. and Lorenz, J. and Tian, C. and Stingeder, G.}, title = {{M}odeling of electronic stopping and damage accumulation during arsenic implantation in silicon}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {1995}, volume = {100}, pages = {483--489} }