@article{TUW-101444, author = {Ghaderi, K. and Hobler, Gerhard}, title = {{S}imulation of phosphorus diffusion in silicon using a pair diffusion model with a reduced number of parameters}, journal = {{J}ournal of the {E}lectrochemical {S}ociety}, year = {1995}, volume = {142}, pages = {1654--1658} }