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@article{TUW-101444,
    author = {Ghaderi, K. and Hobler, Gerhard},
    title = {{S}imulation of phosphorus diffusion in silicon using a pair diffusion model with a reduced number of parameters},
    journal = {{J}ournal of the {E}lectrochemical {S}ociety},
    year = {1995},
    volume = {142},
    pages = {1654--1658}
}