@article{TUW-101445, author = {Hobler, Gerhard and Simionescu, A. and Palmetshofer, L. and Tian, C. and Stingeder, G.}, title = {{B}oron channeling implantations in silicon: {M}odeling of electronic stopping and damage accumulation}, journal = {{J}ournal of {A}pplied {P}hysics}, year = {1995}, volume = {77(8)}, pages = {3697--3703} }