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@article{TUW-101447,
    author = {Hobler, Gerhard},
    title = {{M}onte {C}arlo simulation of two-dimensional implanted dopant distributions at mask edges},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}},
    year = {1995},
    volume = {96},
    pages = {155--162}
}