@article{TUW-101483, author = {Hobler, Gerhard and Bevk, J. and Agarwal, A.}, title = {{C}hanneling of low-energy implanted ions through the poly-{S}i gate}, journal = {{I}{E}{E}{E} {E}lectron {D}evice {L}etters}, year = {1999}, volume = {20 (7)}, pages = {357--359} }