@inproceedings{TUW-101495, author = {Hobler, Gerhard and Pelaz, L. and Rafferty, C.S.}, title = {{D}ose, energy and ion species dependence of the effective plusfactor for transient enhanced diffusion}, booktitle = {{P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology}, year = {1999}, pages = {75--86}, publisher = {{T}he {E}lectrochemical {S}ociety}, note = {talk: {P}rocess {P}hysics and {M}odeling in {S}emiconductor {T}echnology, {P}ennington; 1999-07-01} }