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@inproceedings{TUW-101496,
    author = {Bevk, J. and Hobler, Gerhard and Jacobson, D.C. and Mansfield, W.M. and Jackson, J.},
    title = {{D}opant profiles in dual-poly gates with buried ultra-low-energy implants},
    booktitle = {40th {E}lectronic {M}aterials {C}onf. {T}ech. {P}rogr.},
    year = {1999},
    pages = {8},
    note = {talk: {I}nternational {C}onference on {E}lectronic {M}aterials, {C}harlottesville; 1999-07-01}
}