@inproceedings{TUW-101496, author = {Bevk, J. and Hobler, Gerhard and Jacobson, D.C. and Mansfield, W.M. and Jackson, J.}, title = {{D}opant profiles in dual-poly gates with buried ultra-low-energy implants}, booktitle = {40th {E}lectronic {M}aterials {C}onf. {T}ech. {P}rogr.}, year = {1999}, pages = {8}, note = {talk: {I}nternational {C}onference on {E}lectronic {M}aterials, {C}harlottesville; 1999-07-01} }