@inproceedings{TUW-101498, author = {Bevk, J. and Kuehne, S. and Vaidya, H. and Mansfield, W.M. and Hobler, Gerhard}, title = {{B}uried ultra-low-energy gate implants for sub 0.25micron {C}{M}{O}{S} technology}, booktitle = {{P}roceeding {S}ymp. {V}{L}{S}{I} {T}echnology}, year = {1998}, pages = {74--75}, note = {talk: {V}{L}{S}{I}, {B}erlin; 1998-07-01} }