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@inproceedings{TUW-101498,
    author = {Bevk, J. and Kuehne, S. and Vaidya, H. and Mansfield, W.M. and Hobler, Gerhard},
    title = {{B}uried ultra-low-energy gate implants for sub 0.25micron {C}{M}{O}{S} technology},
    booktitle = {{P}roceeding {S}ymp. {V}{L}{S}{I} {T}echnology},
    year = {1998},
    pages = {74--75},
    note = {talk: {V}{L}{S}{I}, {B}erlin; 1998-07-01}
}