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@inproceedings{TUW-101499,
    author = {Hobler, Gerhard and Vuong, H.-H. and Bevk, J. and Agarwal, A. and Gossmann, H.-J. and Jacobson, D.C. and Foad, M. and Murrell, A. and Erokhin, Y.},
    title = {{M}odeling of ultra-low-energy boron implantation in silicon},
    booktitle = {{I}{E}{D}{M} {T}echm. {D}ig.},
    year = {1997},
    pages = {489--492},
    note = {talk: {I}{E}{E}{E} {C}onference, {P}iscataway; 1997-07-01}
}