@article{TUW-103551, author = {Burenkov, A. and Tietzel, K. and H{\"o}ssinger, Andreas and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried}, title = {{A} {C}omputationally {E}fficient {M}ethod for {T}hree-{D}imensional {S}imulation of {I}on {I}mplantation}, journal = {{I}{E}{I}{C}{E} {T}ransactions on {E}lectronics}, year = {2000}, volume = {E83-C}, number = {8}, pages = {1259--1266}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/JB2000_Burenkov_1.pdf} }