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@article{TUW-103551,
    author = {Burenkov, A. and Tietzel, K. and H{\"o}ssinger, Andreas and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried},
    title = {{A} {C}omputationally {E}fficient {M}ethod for {T}hree-{D}imensional {S}imulation of {I}on {I}mplantation},
    journal = {{I}{E}{I}{C}{E} {T}ransactions on {E}lectronics},
    year = {2000},
    volume = {E83-C},
    number = {8},
    pages = {1259--1266},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/JB2000_Burenkov_1.pdf}
}