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@article{TUW-103554,
    author = {Pyka, Wolfgang and Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {R}esist {D}evelopment {S}imulation - {B}enchmarks and {I}ntegration with {L}ithography},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2000},
    volume = {53},
    number = {1-4},
    pages = {449--452},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/JB2000_Pyka_1.pdf},
    doi = {10.1016/S0167-9317(00)00353-1}
}