@article{TUW-103554, author = {Pyka, Wolfgang and Kirchauer, Heinrich and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {R}esist {D}evelopment {S}imulation - {B}enchmarks and {I}ntegration with {L}ithography}, journal = {{M}icroelectronic {E}ngineering}, year = {2000}, volume = {53}, number = {1-4}, pages = {449--452}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/JB2000_Pyka_1.pdf}, doi = {10.1016/S0167-9317(00)00353-1} }