@article{TUW-103555, author = {Puchner, Helmut and Castagnetti, R. and Pyka, Wolfgang}, title = {{M}inimizing {T}hick {R}esist {S}idewall {S}lope {D}ependence on {D}esign {G}eometry by {O}ptimizing {B}ake {C}onditions}, journal = {{M}icroelectronic {E}ngineering}, year = {2000}, volume = {53}, pages = {429--432}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/JB2000_Puchner_1.pdf} }