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@article{TUW-103555,
    author = {Puchner, Helmut and Castagnetti, R. and Pyka, Wolfgang},
    title = {{M}inimizing {T}hick {R}esist {S}idewall {S}lope {D}ependence on {D}esign {G}eometry by {O}ptimizing {B}ake {C}onditions},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2000},
    volume = {53},
    pages = {429--432},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2000/JB2000_Puchner_1.pdf}
}